lAxially
doped NWs
lResistance:
0.1MΩ (on) to 10GΩ (off) (>104 ratio)
l
lRadially doped NWs
lUse as shield and control spacing or to encode NW.
l
lSilicide – coating Si with Ni and annealing forms metallic NiSi
lResistivity of NiSi = 10-5 Ωcm, of Si = 10-3 Ωcm
lThis reduces NW contact resistance to 10KΩ